Electronic Grade Mixed Gas
Electronics Mixture

Product

Molecular Formula

Purity

Container

Valve

Silane mixture

SiH₄Mix

6N

40L/47L

DISS632

Phosphine mixture

PH₃Mix

6N

40L/44L/47L

DISS632

Ethylborane mixture

B₂H₆Mix

4N

47L

DISS632

Boron trifluoride mixture

BF₃Mix

2N5

47L

DISS632

Methane  mixture

CH₄Mix

5N/6N

40L/47L

DISS632

Ethane mixture

C₂H₆Mix

5N/6N

40L/47L

DISS632

Ethylene mixture

C₂H₄Mix

5N/6N

40L/47L

DISS632