Phosphine

PH₃

6N

47L

DISS632

Silane

SiH₄

6N

47L/440L/470L

DISS632

Ammonia

NH₃

7N

47L/440L/930L

DISS720/CGA660

Nitrogen trifluoride

NF₃

4N

47L/470L

CGA640

Sulphur hexafluoride

SF₆

5N

47L/470L

CGA580/DISS716

Carbon tetrafluoride

CF₄

5N

47L/470L

CGA580/CGA320

Chlorine

Cl₂

5.5N

47L/470L

DISS634

silane

Si₂H₆

4.8N

44L/50L

DISS632

hexafluoroethane

C₂F₆

5N

47L/470L

DISS716

Fluoromethane

CH₃F

4N5

10L

DISS724

Difluoromethane

CH₂F₂

5N

47L

DISS724

Hexafluorobutadiene

C₄F₆

3N/4N

47L

DISS724

Boron trichloride

BCl₃

5N

47L

DISS634/CGA660

Trifluoromethane

CHF₃

5N

47L

JIS22-14L/DISS716

Octafluorocyclobutane

C₄F₈

5N

47L

DISS716

Hydrogen chloride

HCl

5N

47L/470L

CGA330/DISS634

Chlorine trifluoride

ClF₃

3N

40L

DISS728

Carbon monoxide

CO

4N5

47L

DISS724

Carbonyl sulphur

COS

4N

47L

CGA330

Hydrogen bromide

HBr

5N

47L

DISS634

Ethylene

C₂H₄

5N

47L

CGA350/JIS22-L

Ethane

C₂H₆

5N

47L

M22*1.5-LHM/CGA350

Xenon difluoride

XeF₂

5N

0.3L

1/4 VCR

Trichlorosilane (TCS)

SiHCl₃

4N

26L/38L
200L/210L/900L

1/2MVCR
1/4MVCR

Dichlorodihydrogen silane (DCS)

SiH₂Cl₂

3N

40L

CGA636

Hydrogen sulphide

H₂S

3N/4N

8L/47L

CGA330/CGA350

Sulphur dioxide

SO₂

5N

47L

QF-11/CGA660

Nitrous oxide

N₂O

5.5N

47L/470L/ISO TANK

CGA326/DISS712